![[Advanced Microelectronics] Advanced Gate Stacks for High-Mobility Semiconductors Volume 27 || Processing and Characterization of III–V Compound Semiconductor MOSFETs Using Atomic Layer Deposited Gate Dielectrics]()
[Advanced Microelectronics] Advanced Gate Stacks for High-Mobility Semiconductors Volume 27 || Processing and Characterization of III–V Compound Semiconductor MOSFETs Using Atomic Layer Deposited Gate DielectricsDimoulas, Athanasios; Gusev, Evgeni; McIntyre, Paul C.; Heyns, Marc · 2007