![SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - <title>Fabrication of perfectly three-dimensional microstructures by UV depth lithography</title>]()
SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - <title>Fabrication of perfectly three-dimensional microstructures by UV depth lithography</title>Engelmann, Gunter; Ehrmann, Oswin; Leutenbauer, Rudolf; Schmitz, Heike; Reichl, Herbert; Boyd, Ian W. · 1994