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Depth Profile Analysis of Plasma-cured Multi Layer ResistOkumura, Haruki; Matsunobu, Takeshi; Matsuda, Keiko; Ono, Yoshiharu; Ishibashi, Takeo; Hanawa, Tetsuro; Tadokoro, Masahiro; Yoshikawa, Kazunori; Yonekura, Kazumasz; Fujii, Yasushi; Tanaka, Takeshi · Journal of Photopolymer Science and Technology · 2006