Properties of slotted dielectric interfaces
- 期刊名称IRE Transactions on Antennas and Propagation
- 作者Collin, R.
- 卷第7卷
- 期第1期
- 印刷ISSN0096-1973
- 文件大小899.70KB
- 发表时间1959-01
- DOI10.1109/TAP.1959.1144647
- 页码62-73
Proximity effect correction for nanolithographyRau, Richard · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1996
Lithography with 157 nm lasersBloomstein, T. M. · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1997
X-ray lithographyHeuberger, A. · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1988
Resolution limits of optical lithographyOkazaki, Shinji · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1991
Editorial boardMicroelectronics Journal · 2013
Timing characterization and constraining toolAmrozik, Piotr; Napieralski, Andrzej · Microelectronics Journal · 2014
Editorial boardMicroelectronics Journal · 2013
Editorial boardMicroelectronics Journal · 2013