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Substrate bombardment during RF sputtering : I. Brodie et al., J. Vac. Sci. Technol. 6 (1,) Jan.–Feb. (1969), p. 124

Substrate bombardment during RF sputtering : I. Brodie et al., J. Vac. Sci. Technol. 6 (1,) Jan.–Feb. (1969), p. 124

卷第9卷
期第3期
印刷ISSN0026-2714
文件大小107.44KB
发表时间1970
DOI10.1016/0026-2714(70)90099-5

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