Use of Light Scattering for Vacuum Measurement
- 期刊名称Journal of Vacuum Science and Technology
- 作者Marton, L. L.
- 卷第8卷
- 期第1期
- 印刷ISSN0022-5355
- 文件大小303.00KB
- 发表时间1971-1
- DOI10.1116/1.1316314
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