Arsenic Clustering in Silicon
- 期刊名称Journal of Applied Physics
- 作者Schwenker, R. O.
- 卷第42卷
- 期第8期
- 印刷ISSN0021-8979
- 文件大小641.36KB
- 发表时间1971
- DOI10.1063/1.1660706
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