Structural and electrical properties of sputtered tungsten films
- 作者T.T. Sheng; R.B. Marcus; F. Alexander; W.A. Reed
- 卷第14卷
- 期第2期
- 印刷ISSN0040-6090
- 文件大小1029.75KB
- 发表时间1972
- DOI10.1016/0040-6090(72)90429-4
- 页码289-298
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