Jet Polishing of Semiconductors
- 期刊名称Journal of The Electrochemical Society
- 作者Chase, B. D.; Holt, D. B.
- 卷第119卷
- 期第3期
- 印刷ISSN0013-4651
- 文件大小1456.50KB
- 发表时间1972
- DOI10.1149/1.2404193
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