![Spin-on Cu films for ultralarge scale integrated metallization]()
Spin-on Cu films for ultralarge scale integrated metallizationMurakami, Hirohiko; Hirakawa, Masaaki; Ohtsuka, Yoshiro; Yamakawa, Hiroyuki; Imazeki, Nobuya; Hayashi, Shigeo; Suzuki, Toshihiro; Oda, Masaaki; Hayashi, Chikara · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1999