Characterization of boron diffusion from doped oxide source
- 作者J.S.T. Huang
- 卷第16卷
- 期第2期
- 印刷ISSN0038-1101
- 文件大小231.77KB
- 发表时间1973
- DOI10.1016/0038-1101(73)90039-7
- 页码279-281
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