海量图书期刊资源，随时随地畅享阅读乐趣
Real Time Spectroscopic Ellipsometry Study on Growth Processes of ZrO[sub 2] Thin Films in Metallorganic Chemical Vapor DepositionKubota, Takeo; Hara, Nobuyoshi; Sugimoto, Katsuhisa · Journal of The Electrochemical Society · 2001