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Applications of a semiconductor backscattered electron detector in a scanning electron microscope

Applications of a semiconductor backscattered electron detector in a scanning electron microscope

Stephen, J; Smith, B J; Marshall, D C; Wittam, E M
  • 期刊名称Journal of Physics E: Scientific Instruments
  • 作者Stephen, J; Smith, B J; Marshall, D C; Wittam, E M
  • 卷第8卷
  • 期第7期
  • 印刷ISSN0022-3735
  • 文件大小624.59KB
  • 发表时间1975-07
  • DOI10.1088/0022-3735/8/7/021
  • 页码607-610
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