![Dual source APCVD synthesis of TaN and NbN thin films on glass from the reaction of MCl5 (M = Ta, Nb) and 1,1,1,3,3,3-hexamethyldisilazane]()
Dual source APCVD synthesis of TaN and NbN thin films on glass from the reaction of MCl5 (M = Ta, Nb) and 1,1,1,3,3,3-hexamethyldisilazaneNewport, Anne C.; Bleau, Jenelle E.; Carmalt, Claire J.; Parkin, Ivan P.; O'Neill, Shane A. · Journal of Materials Chemistry · 2004