Ion sputtering, evaporation and arcing in DIVA
- 作者K. Ohasa; H. Maeda; S. Yamamoto; M. Nagami; H. Ohtsuka; S. Kasai; K. Odajima; H. Kimura; S. Sengoku; Y. Shimomura
- 印刷ISSN0022-3115
- 文件大小45.73KB
- 发表时间1978
- DOI10.1016/0022-3115(78)90191-5
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