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Oxygen distribution profiles in thin evaporated contacts on single crystal silicon

Oxygen distribution profiles in thin evaporated contacts on single crystal silicon

Sture Petersson; Herman Norde; G. Possnert; B. Orre

作者Sture Petersson; Herman Norde; G. Possnert; B. Orre
卷第149卷
印刷ISSN0029-554X
文件大小255.94KB
发表时间1978
DOI10.1016/0029-554x(78)90874-1
页码285-288

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