RBS and channelling analysis of As and Ga in laser doped silicon
R. Berger; F. Rudolf; C. Jaccard; M.E. Roulet; W. Lüthy; M.R.T. Siregar; H.P. Weber
- 作者R. Berger; F. Rudolf; C. Jaccard; M.E. Roulet; W. Lüthy; M.R.T. Siregar; H.P. Weber
- 卷第168卷
- 印刷ISSN0029-554X
- 文件大小360.09KB
- 发表时间1980
- DOI10.1016/0029-554x(80)91295-1
- 页码469-472