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D.C. reactively sputtered iron oxide films for selectively semitransparent photomasks II: Relation between the structure of the films and their mechanical and chemical properties

D.C. reactively sputtered iron oxide films for selectively semitransparent photomasks II: Relation between the structure of the films and their mechanical and chemical properties

V. Orlinov; B. Goranchev; G. Sarov; A. Misiuk

作者V. Orlinov; B. Goranchev; G. Sarov; A. Misiuk
卷第67卷
期第1期
印刷ISSN0040-6090
文件大小430.13KB
发表时间1980
DOI10.1016/0040-6090(80)90297-7
页码135-144

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