ChemInform Abstract: THERMODYNAMICS AND KINETICS OF CHEMICAL VAPOR DEPOSITION OF ALUMINUM NITRIDE FILMS
- 期刊名称Chemischer Informationsdienst
- 作者PAULEAU, Y.; BOUTEVILLE, A.; HANTZPERGUE, J. J.; REMY, J. C.; CACHARD, A.
- 卷第11卷
- 期第45期
- 印刷ISSN0009-2975
- 文件大小134.07KB
- 发表时间1980-11-11
- DOI10.1002/chin.198045024
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