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[Topics in Applied Physics] Sputtering by Particle Bombardment I Volume 47 || Sputtering by ion bombardment theoretical concepts

[Topics in Applied Physics] Sputtering by Particle Bombardment I Volume 47 || Sputtering by ion bombardment theoretical concepts

Behrisch, Rainer
  • 作者Behrisch, Rainer
  • 文件大小3202.23KB
  • 发表时间1981
  • DOI10.1007/3540105212_7
  • 页码9-71
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