Epitaxial Silicide Formation by Scanning Electron Beam Annealing
- 期刊名称MRS Proceedings
- 作者Ishiwara, Hiroshi; Yamamoto, Hiroshi
- 卷第4卷
- 电子ISSN1946-4274
- 文件大小904.06KB
- 发表时间1981-1
- DOI10.1557/proc-4-437
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