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On the impurity distribution in a thin silicon rod grown by pulling from a melt on pedestal

On the impurity distribution in a thin silicon rod grown by pulling from a melt on pedestal

G.C. Jain; S.N. Singh; R. Kishore

作者G.C. Jain; S.N. Singh; R. Kishore
卷第57卷
期第2期
印刷ISSN0022-0248
文件大小279.71KB
发表时间1982
DOI10.1016/0022-0248(82)90499-7
页码428-431

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