5108. Magnetron sputtering of solar coatings inside tubes: S J Walker and D R McKenzie, J Vac Sci Technol, 19 (3), 1981, 700–703

• 卷第32卷
• 期第7期
• 印刷ISSN0042-207X
• 文件大小138.23KB
• 发表时间1982
• DOI10.1016/0042-207x(82)94141-0