Effect of Thermally Nitrided SiO[sub 2] (Nitroxide) on MOS Characteristics
- 期刊名称Journal of The Electrochemical Society
- 作者Ito, T.
- 卷第129卷
- 期第1期
- 印刷ISSN0013-4651
- 文件大小539.35KB
- 发表时间1982
- DOI10.1149/1.2123752
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