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SPIE Proceedings [SPIE 1981 Brookhaven Conferences - Upton (Monday 16 November 1981)] High Resolution Soft X-Ray Optics - <title>Status Of Microstructure Fabrication</title>

SPIE Proceedings [SPIE 1981 Brookhaven Conferences - Upton (Monday 16 November 1981)] High Resolution Soft X-Ray Optics - Status Of Microstructure Fabrication

Warlaumont, John M.; Spiller, Eberhard A.

作者Warlaumont, John M.; Spiller, Eberhard A.
卷第316卷
印刷ISSN0277-786X
文件大小7351.79KB
发表时间1982
DOI10.1117/12.933143
页码109-119

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