Instrumentation for XUV lithography at SURF-II
L.R. Hughey; R.T. Williams; J.C. Rife; D.J. Nagel; M.C. Peckerar
- 作者L.R. Hughey; R.T. Williams; J.C. Rife; D.J. Nagel; M.C. Peckerar
- 卷第195卷
- 印刷ISSN0167-5087
- 文件大小453.88KB
- 发表时间1982
- DOI10.1016/0029-554x(82)90782-0
- 页码267-271