海量图书期刊资源，随时随地畅享阅读乐趣
Deposition and Etching of Thin Films by Means of Beam Plasma Discharge with Tube-Like Electron BeamV. M. Atamanov; G. B. Levadny; A. A. Ivanov; S. Klagge; M. Maass; Y. F. Nasedkin; U. V. Sereda; A. A. Serov; N. N. Timchenko · 1982