Plasma Anodic Oxidation of InP
- 期刊名称Japanese Journal of Applied Physics
- 作者Fuyuki, Takashi; Moriuchi, Sohta; Matsunami, Hiroyuki
- 卷第22卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小447.86KB
- 发表时间1983-10-20
- DOI10.1143/JJAP.22.1574
- 页码1574-1576
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