Quantifying delineation errors in thin film resistors II: Evaluation of etching rates from resistance measurements
- 作者A. Peled; R. Peled
- 卷第106卷
- 期第3期
- 印刷ISSN0040-6090
- 文件大小187.79KB
- 发表时间1983
- DOI10.1016/0040-6090(83)90477-7
- 页码159-162
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