Microwave plasma etching
- 作者Keizo Suzuki; Ken Ninomiya; Shigeru Mishimatsu
- 卷第34卷
- 印刷ISSN0042-207X
- 文件大小496.09KB
- 发表时间1984
- DOI10.1016/0042-207x(84)90177-5
- 页码953-957
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