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Substitutional doping of photochemically-deposited amorphous hydrogenated silicon

Substitutional doping of photochemically-deposited amorphous hydrogenated silicon

Y. Mishima; M. Hirose; Y. Osaka; Y. Ashida

作者Y. Mishima; M. Hirose; Y. Osaka; Y. Ashida
文件大小478.52KB
发表时间1984
DOI10.1063/1.333813

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