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Role of the piezoelectric effect in device uniformity of GaAs integrated circuits

Role of the piezoelectric effect in device uniformity of GaAs integrated circuits

Chang, M. F.; Lee, C. P.; Asbeck, P. M.; Vahrenkamp, R. P.; Kirkpatrick, C. G.

期刊名称Applied Physics Letters
作者Chang, M. F.; Lee, C. P.; Asbeck, P. M.; Vahrenkamp, R. P.; Kirkpatrick, C. G.
卷第45卷
期第3期
印刷ISSN0003-6951
文件大小426.37KB
发表时间1984
DOI10.1063/1.95172

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