[AIP AIP Conference Proceedings Volume 122 - ()] AIP Conference Proceedings - Dependence of Si-SiO2 interface structures on crystal orientation and oxidation conditions

• 作者Hattori, Takeo; Muto, Masaaki; Suzuki, Toshihisa; Yamabe, Kikuo; Yamauchi, Hiroshi
• 卷第122卷
• 文件大小812.07KB
• 发表时间1984
• DOI10.1063/1.34829
• 页码45-50