Calibration curve for infrared spectrophotometry of nitrogen in silicon
- 作者Itoh, Yoshiko; Nozaki, Tadashi; Masui, Tsumoru; Abe, Takao
- 卷第47卷
- 期第5期
- 电子ISSN0003-6951
- 文件大小400.19KB
- 发表时间1985
- DOI10.1063/1.96101
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