[ACS Symposium Series] Materials for Microlithography Volume 266 (Radiation-Sensitive Polymers) || Organic Direct Optical Recording Media

• 作者Thompson, L. F.; Willson, C. G.; Fréchet, J. M. J.
• 文件大小2147.41KB
• 发表时间1985
• DOI10.1021/bk-1984-0266.ch022
• 页码435-455