Aluminum Metallization Technology for Semiconductor Devices
- 期刊名称JOM
- 作者T. J. Garosshen,T. A. Stephenson,T. P. Slavin
- 卷第37卷
- 期第5期
- 印刷ISSN1047-4838
- 电子ISSN1543-1851
- 文件大小1134.53KB
- 发表时间1985-05
- DOI10.1007/BF03257742
- 页码55-59
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