Ultra-shallow high-concentration boron profiles for CMOS processing
- 期刊名称IEEE Electron Device Letters
- 作者Carey, P.G.; Sigmon, T.W.; Press, R.L.; Fahlen, T.S.
- 卷第6卷
- 期第6期
- 印刷ISSN0741-3106
- 文件大小278.74KB
- 发表时间1985-06
- DOI10.1109/edl.1985.26129
- 页码291-293
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