Solubility and Diffusion Coefficient of Oxygen in Silicon
- 期刊名称Japanese Journal of Applied Physics
- 作者Itoh, Yoshiko; Nozaki, Tadashi
- 卷第24卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小853.97KB
- 发表时间1985-3-20
- DOI10.1143/JJAP.24.279
- 页码279-284
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