![[IEEE IECON 2011 - 37th Annual Conference of IEEE Industrial Electronics - Melbourne, Vic, Australia (2011.11.7-2011.11.10)] IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society - Force controller design based on PQ method for dual-stage actuators in polishing machines]()
[IEEE IECON 2011 - 37th Annual Conference of IEEE Industrial Electronics - Melbourne, Vic, Australia (2011.11.7-2011.11.10)] IECON 2011 - 37th Annual Conference of the IEEE Industrial Electronics Society - Force controller design based on PQ method for dual-stage actuators in polishing machinesSeki, Kenta; Shinohara, Yusaku; Iwasaki, Makoto; Chinda, Hiroshi; Takahashi, Masaki · 2011