[ACS Symposium Series] Materials for Microlithography Volume 266 (Radiation-Sensitive Polymers) || Radiation Stability of Silicon Elastomers
Thompson, L. F.; Willson, C. G.; Fréchet, J. M. J.
- 作者Thompson, L. F.; Willson, C. G.; Fréchet, J. M. J.
- 文件大小579.61KB
- 发表时间1985
- DOI10.1021/bk-1984-0266.ch024
- 页码473-480