Study of the effects of ion beam lithography on the electrical properties of substrates
- 作者Ph. David; L. Karapiperis
- 卷第3卷
- 印刷ISSN0167-9317
- 文件大小359.46KB
- 发表时间1985
- DOI10.1016/0167-9317(85)90025-5
- 页码173-178
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