Negative Ion Kinetics in RF Glow Discharges
- 作者Gottscho, Richard A.; Gaebe, Carl E.
- 卷第14卷
- 期第2期
- 印刷ISSN0093-3813
- 电子ISSN1939-9375
- 文件大小2709.52KB
- 发表时间1986
- DOI10.1109/tps.1986.4316511
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