Fabrication of inversion-type n-channel MOSFET's using cubic-SiC on Si
- 期刊名称IEEE Electron Device Letters
- 作者Shibahara, K.; Saito, T.; Nishino, S.; Matsunami, H.; Matsunami, H.
- 卷第7卷
- 期第12期
- 印刷ISSN0741-3106
- 文件大小245.47KB
- 发表时间1986-12
- DOI10.1109/edl.1986.26522
- 页码692-693
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