海量图书期刊资源,随时随地畅享阅读乐趣
Transport Considerations in the Plasma-Assisted Oxidation of Copper FilmsLi, Yiming; Hess, Dennis W. · Journal of The Electrochemical Society · 2004
Proximity effect correction for nanolithographyRau, Richard · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1996
Lithography with 157 nm lasersBloomstein, T. M. · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1997
X-ray lithographyHeuberger, A. · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1988
Resolution limits of optical lithographyOkazaki, Shinji · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1991
Review of scanning force microscopySarid, Dror · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1991
Diamond nanorodsShenderova, O. A.; Padgett, C. W.; Hu, Z.; Brenner, D. W. · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 2005
Dielectric/semiconductor interfacesWieder, H. H. · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1993
Two-dimensional carrier profilingVandervorst, W. · Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures · 1992