An integrated capacitive pressure sensor with frequency-modulated output

• 作者A. Hanneborg; T.-E. Hansen; P.A. Ohlckers; E. Carlson; B. Dahl; O. Holwech
• 卷第9卷
• 期第4期
• 印刷ISSN0250-6874
• 文件大小747.58KB
• 发表时间1986
• DOI10.1016/0250-6874(86)80066-x
• 页码345-351