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Low-range flowmeters for use with vacuum and leak standards

Low-range flowmeters for use with vacuum and leak standards

McCulloh, K. E.

期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
作者McCulloh, K. E.
卷第5卷
期第3期
印刷ISSN0734-2101
文件大小715.52KB
发表时间1987-5
DOI10.1116/1.574163

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