Sputtered Fitas of Amorphous Hydrogenated Silicon Carbide
- 期刊名称MRS Proceedings
- 作者Rizk, Richard B.; Kaloyeros, Alain E.; Williams, Wendell S.; Finnegan, Nancy; Kozlowski, Carol
- 卷第97卷
- 电子ISSN1946-4274
- 文件大小341.87KB
- 发表时间1987-1
- DOI10.1557/proc-97-295
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