Techniques to Predict Dislocation Generation During Growth of Silicon Ribbon
Tsai, C. T.; Dillon, O. W.; De Angelis, R. J.
- 期刊名称Journal of Engineering Materials and Technology
- 作者Tsai, C. T.; Dillon, O. W.; De Angelis, R. J.
- 卷第109卷
- 期第3期
- 印刷ISSN0094-4289
- 文件大小684.78KB
- 发表时间1987
- DOI10.1115/1.3225965