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Thin films-preparation, structure and properties. Effect of H2O plasma treatment on the adhesion of metal thin films.

NAKAMAE, Katsuhiko; YAMAGUCHI, Katsuya; TANIGAWA, Satoshi; SUMIYA, Kenji; MATSUMOTO, Tsunetaka

期刊名称NIPPON KAGAKU KAISHI
作者NAKAMAE, Katsuhiko; YAMAGUCHI, Katsuya; TANIGAWA, Satoshi; SUMIYA, Kenji; MATSUMOTO, Tsunetaka
期第11期
印刷ISSN0369-4577
电子ISSN2185-0925
文件大小2654.22KB
发表时间1987
DOI10.1246/nikkashi.1987.1995
页码1995-2000