Mechanical stress as a function of temperature in aluminum films
- 作者Gardner, D.S.; Flinn, P.A.
- 卷第35卷
- 期第12期
- 印刷ISSN0018-9383
- 电子ISSN1557-9646
- 文件大小1293.19KB
- 发表时间1988
- DOI10.1109/16.8790
- 页码2160-2169
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